Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

This dictionary includes over 550 new entries on all aspects of mechanical engineering, in the core areas of design, stress analysis, dynamics, thermodynamics, and fluid mechanics, together with newly extended coverage of materials engineering. It is an invaluable guide for students, and for professionals in the field.