Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

Moran's Principles of Engineering Thermodynamics, SI Version, continues to offer a comprehensive and rigorous treatment of classical thermodynamics, while retaining an engineering perspective. With concise, applications-oriented discussion of topics and self-test problems, this book encourages students to monitor their own learning. This classic text provides a solid foundation for subsequent studies in fields such as fluid mechanics, heat transfer and statistical thermodynamics, and prepares...