Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

Moran's Principles of Engineering Thermodynamics, SI Version, continues to offer a comprehensive and rigorous treatment of classical thermodynamics, while retaining an engineering perspective. With concise, applications-oriented discussion of topics and self-test problems, this book encourages students to monitor their own learning. This classic text provides a solid foundation for subsequent studies in fields such as fluid mechanics, heat transfer and statistical thermodynamics, and prepares...

Nanotechnology for Microelectronics and Photonics, Second Edition has been thoroughly revised, expanded, and updated. The aim of the book is to present the most recent advances in the field of nanomaterials, as well as the devices being developed for novel nanoelectronics and nanophotonic systems. It covers the many novel nanoscale applications in microelectronics and photonics that have been developed in recent years.

Looking to the future, the book suggests what other applications are curre...